Versatile process for precision nanoscale manufacturing
AssigneeBoard of Regents, The University of Texas System
InventorsSidlgata V. Sreenivasan, Shrawan Singhal
Life of this patent
Estimating the term…
Loading patent…
AssigneeBoard of Regents, The University of Texas System
InventorsSidlgata V. Sreenivasan, Shrawan Singhal
Estimating the term…
A method for depositing thin films using a nominally curved substrate. Drops of a pre-cursor liquid organic material are dispensed at a plurality of locations on a nominally curved substrate by one or more inkjets. A superstrate is brought down on the dispensed drops to close the gap between the superstrate and the substrate thereby allowing the drops to form a contiguous film captured between the substrate and the superstrate. A non-equilibrium transient state of the superstrate, the contiguous film and the substrate is enabled to occur after a duration of time. The contiguous film is then cured to solidify it into a solid. The solid is separated from the superstrate thereby leaving a polymer film on the substrate. In this manner, such a technique for film deposition has the film thickness range, resolution and variation required to be applicable for a broad spectrum of applications.
A method for depositing thin films, the method comprising:
A method for depositing thin films, the method comprising:
A method for patterning on non-planar substrates, the method comprising:
Dependencies are inferred from the claim text.