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US 9,981,420 B2Granted
Sensor capable of sensing pressure by means of the deformation of a wrinkled piezoelectric layer
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsLamine Benaissa, Jean-Sebastien Moulet
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Abstract
A pressure-sensitive sensor including a substrate supporting a piezoelectric layer of a piezoelectric material. The piezoelectric layer includes surface undulations as wrinkles on which pressure is exerted upon use of the sensor. The piezoelectric layer is sandwiched between two electrodes for collecting charges generated by deformation of the piezoelectric layer.
Claims11
A pressure-sensitive sensor, comprising:
- a substrate supporting a piezoelectric layer of a piezoelectric material,
- wherein the substrate is covered with a layer forming a lower electrode,
- wherein the piezoelectric layer includes surface undulations as wrinkles on which pressure is exerted upon use of the sensor, and
- wherein the piezoelectric layer is an undulated layer formed on the lower electrode and suspended above the substrate outside zones of localized adherent contact with the lower electrode.
1 more element
A pressure-sensitive sensor comprising:
- a substrate supporting a piezoelectric layer of piezoelectric material,
- a lower electrode as an undulated layer suspended above the substrate outside zones of localized adherent contact with the substrate;
- wherein a piezoelectric layer includes surface undulations as wrinkles on which pressure is exerted upon use of the sensor;
- and
- wherein the piezoelectric layer is formed on the lower electrode.
2 more elements
Dependencies are inferred from the claim text.