US 9,978,579 B2 · Analyser arrangement for particle spectrometer

Abstract

The present invention relates to a method for determining at least one parameter related to charged particles emitted from a particle emitting sample, e.g. a parameter related to the energies, the start directions, the start positions or the spin of the particles. The method comprises the steps of guiding a beam of charged particles into an entrance of a measurement region by means of a lens system, and detecting positions of the particles indicative of said at least one parameter within the measurement region. Furthermore, the method comprises the steps of deflecting the particle beam at least twice in the same coordinate direction before entrance of the particle beam into the measurement region. Thereby, both the position and the direction of the particle beam at the entrance of the measurement region can be controlled in a way that to some extent eliminates the need for physical manipulation of the sample. This in turn allows the sample to be efficiently cooled such that the energy resolution in energy measurements can be improved.

Claims19

Dependent claims

A method for determining energies and start directions related to charged particles emitted from a particle emitting sample, comprising the steps of:

forming a particle beam of said charged particles and transporting the particles between said particle emitting sample and an entrance of a measurement region by a lens system having a substantially straight optical axis;
deflecting the particle beam in at least a first coordinate direction perpendicular to the optical axis of the lens system before entrance of the particle beam into the measurement region;
deflecting the particle beam in said at least first coordinate direction at least a second time before entrance of the particle beam into the measurement region;
detecting the positions of said charged particles in said measurement region, the positions being indicative of said energies and start directions;
and
controlling the deflections of the particle beam such that a predetermined part of the angular distribution of the particles forming the particle beam passes the entrance of the measurement region.

3 more elements

An analyser arrangement for determining energies and start directions related to charged particles emitted from a particle emitting sample, comprising:

a measurement region having an entrance allowing said particles to enter the measurement region;
a lens system for forming a particle beam of said charged particles and transporting the particles between said particle emitting sample and said entrance of the measurement region, said lens system having a substantially straight optical axis;
a deflector arrangement comprising a first deflector for deflecting the particle beam in at least a first coordinate direction perpendicular to the optical axis of the lens system before entrance of the particle beam into the measurement region and a second deflector for deflecting the particle beam in said at least first coordinate direction at least a second time before entrance of the particle beam into the measurement region;
a detector arrangement for detecting the positions of the charged particles in the measurement region, said positions being indicative of said energies and start directions;
and
a control unit operable to cause the deflector arrangement to deflect the particle beam such that a predetermined part of the angular distribution of the particles forming the particle beam passes the entrance of the measurement region.

3 more elements

Dependencies are inferred from the claim text.

Analyser arrangement for particle spectrometer

Life of this patent

Analyser arrangement for particle spectrometer

Life of this patent

Abstract

Claims19