Method for inspecting magnetron

A method for inspecting a magnetron, comprising:

• starting generation of a high frequency power by a magnetron based on a set power;
• detecting one or more measurement values for specifying a status of the magnetron;
• and
• determining, with at least one processor, whether or not use conditions are satisfied, wherein the determining includes:
• determining whether or not a time period having a predetermined duration or more has elapsed after a start time point at which the generation of the high frequency power by the magnetron is started;
• determining whether or not a difference between a power of a progressive wave based on the high frequency power generated by the magnetron and the set power is equal to or lower than a first predetermined value;
• determining whether or not a power of a reflection wave outputted from a directional coupler provided between the magnetron and a load is equal to or lower than a second predetermined value;
• and
• determining that the use conditions are satisfied if the time period having the predetermined duration or more has elapsed after the start time point, the difference between the power of the progressive wave and the set power is equal to or lower than the first predetermined value, and the power of the reflection wave is equal to or lower than the second predetermined value,
• wherein if it is determined that the use conditions are satisfied, determining, with the at least one processor, a life of the magnetron on the basis of a comparison between a current parameter, which indicates a current status of the magnetron and is obtained from the one or more measurement values at a time point satisfying the use conditions, and an initial parameter, which indicates an initial status of the magnetron and corresponds to the current parameter, and
• if it is determined that the use conditions are not satisfied, detecting one or more measurement values for specifying the status of the magnetron until the use conditions are satisfied.