Thermal-type flow-rate sensor
AssigneeMurata Manufacturing Co., Ltd.
InventorsTaro Nishino, Kansho Yamamoto, Katsumi Fujimoto
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Abstract
A thermal-type flow-rate sensor includes a substrate and a detection unit that is supported by the substrate and at least an upper surface of which is exposed to a flow of a fluid. The detection unit includes: an insulating layer, a heating element arranged on an upper surface of the insulating layer, an upstream temperature measurement element that is arranged on the upper surface of the insulating layer upstream of the heating element in the flow direction that includes a pyroelectric layer, and a downstream temperature measurement element arranged on the upper surface of the insulating layer so as to be positioned downstream of the heating element in the flow direction and that includes a pyroelectric layer.
Claims11
A thermal-type flow-rate sensor comprising:
- a substrate;
- and
- a detection unit supported by the substrate and having an upper surface adapted to be exposed to a flow of a fluid in a flow direction;
- the detection unit including:
- an insulating layer,
- a heating element arranged on an upper surface of the insulating layer;
- an upstream temperature measurement element arranged on the upper surface of the insulating layer upstream of the heating element relative to the flow direction, the upstream temperature measurement element including a pyroelectric layer, and
- a downstream temperature measurement element arranged on the upper surface of the insulating layer so as to be positioned downstream of the heating element relative to the flow direction, the downstream temperature measurement element including a pyroelectric layer.
Dependencies are inferred from the claim text.