US 9,969,611 B1 · Structure for controlling flashover in MEMS devices

Abstract

An improved microelectromechanical device includes an upper plate, a lower plate, and a spacing structure. The upper plate includes a first surface and an opposite second surface. The lower plate is spaced from the upper plate. The lower plate includes a third surface that faces the first surface of the upper plate and a fourth surface that is opposite of the third surface. The lower plate also includes a series of structures disposed with the third surface of the lower plate. The spacing structure is coupled to the upper and lower plate. The spacing structure includes a base portion that is sealed to the first surface of the upper plate and the third surface of the lower plate. The spacing structure further includes a protrusion that extends from the base portion between the upper and lower plates.

Claims20

Dependent claims

A microelectromechanical device, comprising:

an upper plate with a first surface and opposite second surface;
a lower plate spaced from the upper plate, the lower plate comprising:
a third surface facing the first surface of the upper plate,
a fourth surface opposite of the third surface, and
a series of trenches disposed within the third surface;
and
a spacing structure sealed annularly to the first surface of the upper plate and the third surface of the lower plate such that the upper plate, the lower plate, and the spacing structure define a space, the spacing structure having a base portion extending between the upper plate and the lower plate and a protruding portion that extends inwardly from the base portion into the space.

4 more elements

Dependencies are inferred from the claim text.

Structure for controlling flashover in MEMS devices

Life of this patent

Structure for controlling flashover in MEMS devices

Life of this patent

Abstract

Claims20