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US 9,966,168 B1Granted
Method of fabricating conductive thin film
AssigneeNational Cheng Kung University
InventorsChang-Shu Kuo, In-Gann Chen, Hung-Tao Chen, Han-Hsuan Cheng
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Abstract
A method of fabricating a conductive thin film includes the following steps: forming a polymer fiber made of a polymer and a metal precursor distributed in a surface layer near the surface of the polymer fiber; and applying a plasma treatment on the polymer fiber to concurrently etch the polymer and reduce the metal precursor in the surface layer of the polymer fiber. When the plasma treatment is completed, a metal membrane is formed on the surface of the polymer fiber.
Claims20
A method of fabricating a conductive thin film, comprising:
- forming a polymer fiber, wherein a composition of the polymer fiber comprises a polymer and at least a metal precursor, the metal precursor is distributed in a surface layer of the polymer fiber;
- and
- applying a plasma treatment on the polymer fiber to concurrently etch the polymer and reduce the metal precursor in the surface layer of the polymer fiber, whereby a metal membrane is formed on the surface of the polymer fiber.
Dependencies are inferred from the claim text.