Method for finishing a glass product and glass product
AssigneeInfineon Technologies AG
InventorsDavid Baum, Kurt Sorschag, Martin Kulterer
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Abstract
Embodiments of the present invention provide a method for finishing a glass product including a glass layer, the glass layer comprising boron. The method includes the step of cleaning the glass layer in order to remove boron at least at the surface of the glass layer. The step of cleaning includes the substep of esterification using a medium comprising an alcohol.
Claims19
A method for finishing a glass product comprising a glass layer, the glass layer comprising boron, the method comprising:
- cleaning the glass layer in order to remove boron at a surface of the glass layer, wherein the step of cleaning comprises a substep of esterification using a medium comprising an alcohol, wherein the method comprises a process step of structuring the glass layer comprising a substep of lithography before performing the step of cleaning.
A method for manufacturing a glass substrate that comprises boron, the method comprising:
- structuring the glass substrate including performing a lithography step;
- and
- cleaning the glass substrate in order to remove boron at a near surface of the glass substrate up to a depth of 100 nm of the glass substrate, wherein the cleaning comprises esterification using a medium comprising more than 80% of MeOH and less than 5% of H2SO4.
A method for finishing a glass product comprising a glass layer, the glass layer comprising boron, the method comprising:
- cleaning the glass layer in order to remove boron at a surface of the glass layer, wherein the step of cleaning comprises a substep of esterification using a medium comprising an alcohol, wherein the step of cleaning includes a process step of hard mask stripping after the substep of esterification.
Dependencies are inferred from the claim text.