Systems and methods for graphene mechanical oscillators with tunable frequencies
AssigneeThe Trustees of Columbia University in the City of New York
InventorsChangyao Chen, James Hone, Sunwoo Lee
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Abstract
A nano-electro-mechanical systems (NEMS) oscillator can include an insulating substrate, a source electrode and a drain electrode, a metal local gate electrode, and a micron-sized, atomically thin graphene resonator. The source electrode and drain electrode can be disposed on the insulating substrate. The metal local gate electrode can be disposed on the insulating substrate. The graphene resonator can be suspended over the metal local gate electrode and define a vacuum gap between the graphene resonator and the metal local gate electrode.
Claims21
A nano-electro-mechanical systems (NEMS) oscillator, comprising:
- an insulating substrate;
- a source electrode and a drain electrode disposed on the substrate;
- a metal local gate electrode disposed on the substrate;
- and
- a micron-size, atomically thin graphene resonator suspended over the metal local gate electrode and defining a vacuum gap between the graphene resonator and the metal local gate electrode;
- wherein a degree of tunability depends on an initial built in tension of the graphene resonator.
A frequency modulated (FM) signal generator comprising:
- a nano-electro-mechanical systems (NEMS) oscillator including
- a substrate;
- a source electrode and a drain electrode disposed on the substrate;
- a metal local gate electrode disposed on the substrate;
- and
- a micron-size, atomically thin graphene resonator suspended over the metal local gate electrode and defining a vacuum gap between the graphene resonator and the metal local gate electrode;
- wherein a degree of tunability depends on an initial built in tension of the graphene resonator.
A method for fabricating a NEMS oscillator, comprising:
- growing a micron-sized, atomically thin CVD graphene on one or more copper foil substrates;
- transferring the CVD graphene to a pre-patterned substrate;
- patterning a source electrode, a drain electrode, and a clamping structure;
- and releasing the graphene;
- wherein a degree of tunability depends on an initial built in tension of the graphene.
Dependencies are inferred from the claim text.