Stress compensated oscillator circuitry and integrated circuit using the same

Stress compensated oscillator circuitry, comprising:

• a sensor arrangement for providing a sensor output signal, the sensor arrangement comprising a stress-sensitive sensor element and a stress-insensitive resistive element, wherein the sensor output signal is based on an instantaneous stress or strain component in a semiconductor substrate,
• a processing arrangement for processing the sensor output signal and providing a control signal depending on the instantaneous stress or strain component in the semiconductor substrate, and
• an oscillator arrangement for providing an oscillator output signal having an oscillator frequency based on the control signal,
• wherein the stress-sensitive sensor element provides a stress dependent sensor signal having a stress component dependency with respect to at least one of a sum of normal stress components, a difference of the normal stress components, or a shear stress component in the semiconductor substrate, wherein the stress-insensitive resistive element provides a stress-insensitive signal, and wherein the sensor output signal is based on a combination of the stress dependent sensor signal and the stress-insensitive signal;
• and
• wherein the control signal controls the oscillator output signal, and wherein the control signal reduces an influence of the instantaneous stress or strain component in the semiconductor substrate onto the oscillator output signal, so that the stress compensated oscillator circuitry provides a stress compensated oscillator output signal.