Back to results
US 9,960,340 B2Granted
Amplified piezo actuator with coarse adjustment
AssigneeThorlabs, Inc.
InventorsSaeed Fathi, Mark Robson, Keith Dhese
Life of this patent
Estimating the term…
Abstract
A piezoelectric actuator with integrated features to provide coarse position adjustment of a pushing threaded rod and also mechanically amplified piezo motion for fine position adjustment is presented here in three design variants. The mechanical amplifier houses one or more piezo stacks in longitudinal axis with preload to translate an amplified motion in the order of a few times in the transverse axis, perpendicular to the piezo stack motion. The piezo amplifier output travel is transmitted to the threaded rod with a ball at the end to push a desired surface for position adjustments and motion translation in application such as a mirror mount.
Claims15
An actuator, comprising:
- a threaded screw;
- and
- a piezo amplifier;
- wherein the piezo amplifier comprises:
- a top wall, a bottom wall, a first and second side walls, the walls being joined by flex hinges;
- a first and second piezo stacks;
- and
- an intermediate coupling component;
- wherein one end of the first piezo stack is coupled to the first side wall, one end of the second piezo stack is coupled to the second side wall, and the other ends of the first and second piezo stacks couple to each other via the intermediate coupling component;
- wherein the top wall comprises a threaded hole, the bottom wall comprises a first through hole, and the intermediate coupling component comprises a second through hole;
- wherein the threaded screw passes through the first and second through holes and engages with the threaded hole;
- wherein when a voltage is applied to the piezo stacks, the piezo stacks cause a horizontal movement of the side walls by expansion or contraction of the piezo stacks, the horizontal movement causes a perpendicular movement of the top wall via the flex hinges, and the perpendicular movement causes a first translation movement of the threaded screw by the threaded hole of the top wall pulling or pushing the threaded screw;
- and
- wherein a rotation of the threaded screw relative to the threaded hole causes a second translation movement of the threaded screw.
11 more elements
An actuator, comprising:
- a threaded screw;
- and
- a piezo amplifier;
- wherein the piezo amplifier comprises:
- a top wall, a bottom wall, a first and second side walls, the walls being joined by flex hinges;
- and
- a piezo stack;
- wherein one end of the piezo stack is coupled to the first side wall and the other end of the piezo stack is coupled to the second side wall;
- wherein the top wall comprises a threaded hole and the bottom wall comprises a through hole, both holes being offset by a distance from a plane containing the piezo stack;
- wherein the threaded screw passes through the through hole and engages with the threaded hole;
- wherein when a voltage is applied to the piezo stack, the piezo stack causes a horizontal movement of the side walls by expansion or contraction of the piezo stack, the horizontal movement causes a perpendicular movement of the top wall via the flex hinges, and the perpendicular movement causes a first translation movement of the threaded screw by the threaded hole of the top wall pulling or pushing the threaded screw;
- and
- wherein a rotation of the threaded screw relative to the threaded hole causes a second translation movement of the threaded screw.
10 more elements
An actuator, comprising:
- a threaded screw;
- and
- a first and second piezo amplifiers;
- wherein each of the first and second piezo amplifiers comprises:
- a top wall, a bottom wall, a first and second side walls, the walls being joined by flex hinges;
- and
- a piezo stack;
- wherein one end of the piezo stack is coupled to the first side wall and the other end of the piezo stack is coupled to the second side wall;
- wherein the first and second piezo amplifiers are parallel and separated by a distance, and the top walls of the first and second piezo amplifiers are integrated and the integrated top walls comprise a threaded hole;
- wherein the threaded screw passes through the space between the first and second piezo amplifiers and engages with the threaded hole;
- wherein when a voltage is applied to the piezo stack of each of the first and second piezo amplifiers, the piezo stack causes a horizontal movement of the side walls by expansion or contraction of the piezo stacks, the horizontal movement causes a perpendicular movement of the top wall via the flex hinges, and the perpendicular movement causes a first translation movement of the threaded screw by the threaded hole pulling or pushing the threaded screw;
- and
- wherein a rotation of the threaded screw relative to the threaded hole causes a second translation movement of the threaded screw.
10 more elements
Dependencies are inferred from the claim text.