Thin film transistor, array substrate, and fabrication method there of, and display apparatus
AssigneeBoe Technology Group Co., Ltd.
InventorLi Zhang
Life of this patent
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Abstract
A thin film transistor comprises a source over a substrate; a first insulation layer having a source contact through-hole corresponding to a position of the source over the source; an active layer electrically connecting with the source through the source contact through-hole over the etching stop layer; a second insulation layer having a drain contact through-hole exposing a portion of the active layer over the active layer; and a drain electrically connecting with the active layer through the drain contact through-hole over the second insulation layer.
Claims20
A thin film transistor, comprising:
- a source over a substrate;
- a first insulation layer having a source contact through-hole corresponding to the source over the source;
- an active layer electrically connecting with the source through the source contact through-hole over the first insulation layer;
- a second insulation layer having a drain contact through-hole exposing an upper surface of a portion of the active layer disposed outside the source contact through-hole;
- and
- a drain electrically connecting with the active layer through the drain contact through-hole over the second insulation layer.
A method for fabricating a thin film transistor, comprising:
- forming a source on a substrate;
- forming a first insulation layer having a source contact through-hole exposing the source over the substrate;
- forming an active layer connecting with the source through the source contact through-hole over the first insulation layer;
- forming a second insulation layer over the active layer and the first insulation layer, the second insulation layer having a drain contact through-hole exposing an upper surface of a portion of the active layer disposed outside the source contact through-hole;
- and
- forming a drain electrically connecting with the active layer over the second insulation layer.
Dependencies are inferred from the claim text.