Method for forming semiconductor device
AssigneesUnited Microelectronics Corp., Fujian Jinhua Integrated Circuit Co., Ltd.
InventorsChien-Ting Ho, Li-Wei Feng, Ying-Chiao Wang, Yu-Chieh Lin
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AssigneesUnited Microelectronics Corp., Fujian Jinhua Integrated Circuit Co., Ltd.
InventorsChien-Ting Ho, Li-Wei Feng, Ying-Chiao Wang, Yu-Chieh Lin
Estimating the term…
A method for forming a semiconductor device includes providing a substrate having a plurality of memory cells formed therein; forming an insulating layer on the substrate; forming a plurality of openings in the insulating layer and exposing a portion of the memory cells; forming a conductive portion and a metal layer in the openings; removing a portion of the metal layer to form a plurality of first metal portions and a plurality of second metal portions that the first metal portion and the conductive portion form a first connecting structure, and the second metal portion and the conductive portion form a second connecting structure; forming a passivation layer on the first connecting structures; and forming a plurality of first storage nodes and dummy nodes on the substrate and the first storage nodes and the dummy nodes are electrically connected to the second connecting structures and the first connecting structures respectively.
A method for forming a semiconductor device, comprising:
Dependencies are inferred from the claim text.