Device and method for treating substrate surfaces
AssigneeEV Group E. Thallner GmbH
InventorsThomas Glinsner, Ronald Holzleitner, Thomas Wieser, Florian Schmid
Life of this patent
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Abstract
A device and method for treatment of a substrate treatment surface of a substrate with a fluid by immersion of the substrate treatment surface into the fluid. The device includes: receiving means for receiving the fluid with an immersion opening and immersion means for immersion of the substrate treatment surfaces through the immersion opening into the receiving means, Rotation means are provided for rotation of the receiving means for at least predominant discharge of the fluid from the receiving means.
Claims15
A device to treat a substrate treatment surface of a substrate with a fluid when the substrate treatment surface is immersed into the fluid, said device being comprised of:
- receiving means comprising an immersion area configured to receive the fluid into which the substrate treatment surface is immersed during treatment thereof;
- a chuck to which a receiving surface of the substrate is fixed during said treatment, the receiving surface facing away from the substrate treatment surface;
- a first hollow body on which the receiving means is fixed to rotate therewith;
- a drive motor configured to rotate the first hollow body to effect discharge of the fluid from the receiving means and empty the fluid out of the receiving means;
- heating means positioned underneath the receiving means in a heating area defined by the receiving means and the first hollow body, the heating means comprising a heating body and a heating plate held in the heating area by the heating body, the heating plate being configured to heat the fluid in the immersion area;
- and
- flushing means disposed between the first hollow body and the chuck, the flushing means being configured to flush a flushing fluid along a flushing surface of the substrate, the flushing surface being provided outside the substrate treatment surface and outside the receiving surface, the flushing surface extending annularly around the receiving surface.
A method for treatment of a substrate treatment surface of a substrate with a fluid when the substrate treatment surface is immersed in the fluid, the method comprising:
- receiving the fluid in an immersion area of a receiving means into which the substrate treatment surface is to be immersed during treatment thereof;
- fixing a receiving surface of the substrate that faces away from the substrate treatment surface to a chuck;
- fixing the receiving means to a first hollow body to rotate therewith;
- immersing the substrate treatment surface into the fluid for treatment therein;
- flushing a flushing fluid along a flushing surface of the substrate using a flushing means disposed between the first hollow body and the chuck, the flushing surface being provided outside the substrate treatment surface and outside the receiving surface, the flushing surface extending annularly around the receiving surface;
- heating the fluid in the immersion area during the treatment of the substrate treatment surface immersed in the fluid, the heating comprising activating heating means positioned underneath the receiving means in a heating area defined by the receiving means and the first hollow body;
- withdrawing the substrate treatment surface from the fluid after the treatment thereof;
- and
- discharging the fluid from the receiving means by rotating the first hollow body to empty the fluid out of the receiving means.
Dependencies are inferred from the claim text.