Back to results
US 9,960,057 B2Granted
Device for measuring the distribution or impulse of a series of droplets
AssigneeLam Research Corporation
InventorsMichael Dalmer, Alexander Lippert, Philipp Engesser, Rainer Obweger
Life of this patent
Estimating the term…
Abstract
A device for measuring the distribution and/or impulse of a series of droplets comprises a piezoelectric sensor positioned relative to a source of droplets such that each of a plurality of droplets contacts the piezoelectric sensor in succession, thereby to generate an electrical signal. Logic circuitry is configured to calculate one or more frequencies from the electrical signal.
Claims3
An apparatus for wet treatment of wafer-shaped articles, comprising:
- a spin chuck adapted to hold a wafer-shaped article in a predetermined orientation;
- a droplet generator configured to dispense liquid through at least one orifice as a spray of monodisperse liquid droplets, the droplet generator being movable between a rest position and a use range of motion;
- a piezoelectric sensor positioned beneath the droplet generator in said rest position, such that each of a plurality of said droplets dispensed from the droplet generator in the rest position contacts said piezoelectric sensor in succession, thereby to generate an electrical signal;
- and
- logic circuitry configured to calculate one or more frequencies and/or amplitudes for one or more predetermined frequencies from said electrical signal.
2 more elements
Dependencies are inferred from the claim text.