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US 9,960,023 B2Granted
Methods and apparatus for nodule control in a titanium-tungsten target
AssigneeApplied Materials, Inc.
InventorsJunqi Wei, Zhitao Cao, Yueh Sheng Ow, Ananthkrishna Jupudi, Kirankumar Savandaiah, Xin Wang, Sriskantharajah Thirunavukarasu
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Abstract
Embodiments of the present disclosure include methods and apparatus for controlling titanium-tungsten (TiW) target nodule formation. In some embodiments, a target includes: a source material comprising predominantly titanium (Ti) and tungsten (W), formed from a mixture of titanium powder and tungsten powder, wherein a grain size of a predominant quantity of the titanium powder is less than or equal to a grain size of a predominant quantity of the tungsten powder.
Claims16
A target, comprising:
- a source material comprising predominantly titanium (Ti) and tungsten (W), formed from a mixture of titanium powder and tungsten powder, wherein a grain size of a predominant quantity of the titanium powder is less than a grain size of a predominant quantity of the tungsten powder.
A target, comprising:
- a source material comprising predominantly titanium (Ti) and tungsten (W), formed from a mixture of titanium powder and tungsten powder, wherein a grain size of a predominant quantity of the titanium powder is less than or equal to a grain size of a predominant quantity of the tungsten powder, wherein an average grain size of the tungsten powder is about 20 μm to about 45 μm, and wherein after forming the target, the target has an average titanium-tungsten grain size of about 60 μm.
Dependencies are inferred from the claim text.