Physical vapor deposition (PVD) target having low friction pads
AssigneeApplied Materials, Inc.
InventorsMartin Lee Riker, Uday Pai, William Fruchterman, Keith A. Miller, Muhammad M. Rasheed, Thanh X. Nguyen, Kirankumar Savandaiah
Life of this patent
Estimating the term…
Abstract
Embodiments of target assemblies for use in substrate processing chambers are provided herein. In some embodiments, a target assembly includes a plate comprising a first side including a central portion and a support portion; a target disposed on the central portion; a plurality of recesses formed in the support portion; and a plurality of pads partially disposed in the plurality of recesses.
Claims13
A target assembly for a substrate processing chamber, comprising:
- a plate comprising a first side including a central portion and a support portion, wherein the central portion is configured to support target source material;
- a plurality of recesses formed in the support portion;
- and
- a plurality of pads partially disposed in the plurality of recesses, wherein each of the plurality of pads is secured to the support portion via a fastener disposed through the pad, wherein each of the plurality of pads includes a bearing surface, a countersunk recess having a first diameter that extends partially into a body of the pad, and a through hole having a second diameter that is smaller than the first diameter, and wherein a head of the fastener is disposed within the countersunk recess of the pad below the bearing surface.
A target assembly for a substrate processing chamber, comprising:
- a plate comprising a first side including a central portion and a support portion, wherein the central portion is configured to support target source material;
- a groove formed in the plate separating the support portion into an atmospheric side radially outward from the groove and a vacuum side radially inward from the groove;
- a plurality of recesses formed in the atmospheric side of the support portion and circumferentially spaced about the plate;
- and
- a plurality of friction reducing pads partially disposed in the plurality of recesses such that a bearing surface is spaced above the first side of the plate, wherein each of the plurality of friction reducing pads is secured to the support portion via a fastener disposed through the pad, wherein each of the plurality of friction reducing pads includes a bearing surface, a countersunk recess having a first diameter that extends partially into a body of the pad, and a through hole having a second diameter that is smaller than the first diameter, and wherein a head of the fastener is disposed within the countersunk recess of the pad below the bearing surface.
Dependencies are inferred from the claim text.