Method and apparatus for saving energy while increasing the conveying speed in vacuum coating plants

A method for saving energy and simultaneously increasing the throughput speed in vacuum coating installations which consist of a sequence of sputtering segments (3) and gas separating segments (2) with a continuous substrate plane (1), having the following features:

• d) in order to carry out the method, use is made of sputtering segments (3) in which the tank flange (6) for connecting the tank tub (12) and the tank cover (4) is positioned in the immediate vicinity above the substrate plane (1) in order that, in the event of process changes and maintenance work, the entire tank cover (4) with all the components located therein can be changed quickly in a time-saving and cost-effective manner,
• e) the gas separating segments (2) are provided along their entire length with a tunnel for delimiting the respective substrate with respect to the adjoining region of the gas separating segment (2), wherein the height of the tunnel can be adapted to the thickness of the respective substrate in such a way that the location of the tunnel cover (14) is changed by means of a plurality of lifting and lowering elements (17) such that a minimum clearance gap remains between the substrate and the tunnel cover (14),
• f) sputtering elements (3) and/or gas separating segments (2) are evacuated by means of one or more vacuum pumps (15), wherein the air conveyed in the process is collected in a variable-volume air reservoir (25) and, when the relevant segment (3, 2) is subsequently aerated again, is delivered back into this segment (3, 2), in order that the air that has already been conditioned once can be utilized again in a time-saving and cost-effective manner.