Life enhancement of ring assembly in semiconductor manufacturing chambers

A ring assembly, comprising:

• an outer ring body, comprising:
• a top surface and a bottom surface substantially parallel to the top surface;
• an outside surface extending between the top and bottom surfaces;
• an inside surface extending between the top and bottom surfaces, the inside surface having a notch, and the notch having a roof projecting from an upper portion of the outer ring body;
• a first and second annular extensions extending from the bottom surface of the outer ring body, wherein the first and second annular extensions are parallel and radially spaced from each other;
• and
• a third annular extension extending from the outer ring body in a direction perpendicular to the first and second annular extensions, the third annular extension forming part of the inside surface and having a surface slanted relative to the top surface and the bottom surface of the outer ring body at an angle above zero;
• and
• an inner ring body partially disposed radially inward of the outer ring body, wherein the inner ring body is symmetrically nestable in the notch in two flipped orientations, the inner ring body comprising:
• a top surface abutting and projecting inward of the third annular extension;
• and
• an outer surface disposed below the third annular extension and abutting the outer ring body,
• wherein the top surface of the inner ring body is spaced apart from the roof to define a vertical gap therebetween when the inner ring body is nested within the outer ring body and when the inner ring body and the outer ring body are supported on a common surface, wherein an inner diameter of the inner ring body is greater than an outer diameter of a substrate to be processed and an inner diameter of the outer ring body is greater than the inner diameter of the inner ring body but less than an outer diameter of the inner ring body.

A ring assembly, comprising:

• an outer ring body having a top surface, a bottom surface opposite the top surface, an outside surface and an inside surface extending between the top and bottom surfaces, a first and second annular extensions parallel and radially spaced from each other extending from the bottom surface, and a third annular extension extending from the inside surface in a direction away from the outside surface perpendicular to the first and second annular extensions, wherein the third annular extension has a surface slanted relative to the top surface at an angle above zero;
• and
• an inner ring body being partially surrounded by the outer ring body, wherein the inner ring body is symmetrically nestable under the third annular extension in the outer ring body in two orientations, the nested inner ring body and outer ring body having the same combined sectional profile when the inner ring body is in either flipped orientation, wherein a top surface of the inner ring body is spaced apart from the third annular extension to define a vertical gap therebetween and an outer surface of the inner ring body abutting the third annular extension is spaced apart from the inside surface to define a horizontal gap therebetween when the inner ring body is nested within the outer ring body and when the inner ring body and the outer ring body are supported on a common surface, wherein an inner diameter of the inner ring body is greater than an outer diameter of a substrate to be processed and an inner diameter of the outer ring body is greater than the inner diameter of the inner ring body but less than an outer diameter of the inner ring body.