Plasma generation apparatus and plasma generation method

A plasma generation apparatus comprising:

• a chamber including a dielectric window and a toroidal discharge space without a substrate;
• a magnetic core disposed to surround a portion of the chamber;
• an induction coil disposed to wind around the magnetic core;
• and
• a waveguide radiating a microwave through the dielectric window,
• wherein alternating current flowing in the induction coil forms a magnetic flux at the magnetic core, and the magnetic flux generates inductively-coupled plasma in the toroidal discharge space,
• wherein the radiated microwave is configured to generate initial microwave plasma for ignition inside the chamber without an external static magnetic field, wherein the chamber includes first to fourth bodies,
• wherein the first to fourth bodies are sequentially connected to provide the toroidal discharge space,
• wherein the magnetic core includes a first magnetic core and a second magnetic core,
• wherein the first magnetic core is disposed to surround the first body, wherein the second magnetic core is disposed to surround the third body,
• wherein the waveguide includes a first waveguide with a first slit and a second waveguide with a second slit,
• wherein the first waveguide and the second waveguide are rectangular waveguides,
• wherein the first slit is formed on a side wall of the first waveguide, wherein the second slit is formed on a side wall of the second waveguide, wherein the dielectric window includes a first dielectric window and a second dielectric window,
• wherein the first dielectric window is mounted on the second body, and the second dielectric window is mounted on the fourth body,
• wherein the first slit provides radiates a microwave to the second body through the first dielectric window, and
• wherein the second slit provides radiates a microwave to the fourth body through the second dielectric window.