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US 9,959,961 B2Granted
Permanent magnetic chuck for OLED mask chucking
AssigneeApplied Materials, Inc.
InventorsJohn M. White, Zuoqian Wang
Life of this patent
Estimating the term…
Abstract
A permanent magnetic mask chuck is described herein. The permanent magnetic mask chuck includes a body with a plurality of permanent magnets positioned therein. The permanent magnets can then deliver a magnetic force to a mask to position and hold the mask over or on the substrate for further deposition.
Claims8
A substrate carrier for use in a process chamber, the substrate carrier comprising:
- a support base configured to move into and out of a process chamber, the support base comprising:
- a substrate supporting surface;
- and
- an electrode assembly operable to electrostatically chuck a substrate to the substrate supporting surface;
- and
- a permanent magnetic mask chuck coupled to the support base, the permanent magnetic mask chuck comprising:
- a chuck body having a first wall and a second wall, the first wall being proximate to the support base and the second wall being distal to the support base;
- a plurality of permanent magnets positioned in the chuck body, the permanent magnets having a magnetic field;
- and
- a positioning device to move the permanent magnetic mask chuck independent of the support base.
7 more elements
Dependencies are inferred from the claim text.