Magnetoresistive devices and methods for manufacturing magnetoresistive devices
AssigneeInfineon Technologies AG
InventorsWolfgang Raberg, Andreas Strasser, Hermann Wendt, Klemens Pruegl
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AssigneeInfineon Technologies AG
InventorsWolfgang Raberg, Andreas Strasser, Hermann Wendt, Klemens Pruegl
Estimating the term…
A magnetoresistive device that can include a magnetoresistive stack and an etch-stop layer (ESL) disposed on the magnetoresistive stack. A method of manufacturing the magnetoresistive device can include: depositing the magnetoresistive stack, the ESL and a mask layer on a substrate; performing a first etching process to etch a portion of the mask layer to expose a portion of the ESL; and performing a second etching process to etch the exposed portion of the ESL. The second etching process can also etch a portion of the magnetoresistive stack. The first and second etching processes can be different. For example, the first etching process can be a reactive etching process and the second etching process can be a non-reactive etching process.
A method for manufacturing a magnetoresistive device,
A method for manufacturing a magnetoresistive device,
A method for manufacturing a magnetoresistive device,
Dependencies are inferred from the claim text.