US 9,959,639 B2 · Method of ptychographic imaging

Abstract

A method and apparatus for ptychographic imaging is described. Typically a high number of pixels (after binning) is needed to obtain a high quality reconstruction of an object. By using calculation planes with more nodes (for example 512×512 nodes) than the number of pixels of the detector, a high quality reconstruction of an object can be made, even when using for example a 16 segment detector, or a 32×32 pixel detector. Although the reconstructed object shows less resolution (“sharpness”), all features are there.

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Claims20

Dependent claims

A method of ptychographic imaging, comprising:

providing an object in an object plane
providing a pixelated detector in a detector plane, the detector plane conjugated to the object plane by a Fresnel propagator, the pixelated detector equipped to detect the intensity of a wave front,
providing a radiation source and probe forming parts equipped to form an input wave front on the object plane, the input wave front transformed to an output wave front by the object,
providing a mathematical estimate of the object, an estimate of the Fresnel propagator and an estimate of the input wave front, the mathematical estimate of the object represented by a number of nodes in a first calculation plane, each node a complex value,
acquiring at least two images by:
selecting an area of the object for irradiation,
irradiating the area with radiation,
detecting the intensity of a detector wave front on the pixelated detector, resulting in a detector image,
wherein each irradiated area overlaps with at least one other irradiated area;
and
iteratively
updating the mathematical estimate of the object such that, after multiplying the mathematical estimate of the object with the estimate of the input wave front in the first calculation plane and after propagating using the Fresnel propagator to a mathematical estimate of the image represented by a number of nodes of a second calculation plane, the detected intensity of a pixel of the detector image matches the intensity of the corresponding area of the mathematical estimate of the image in said second calculation plane for the at least two images, until a break-off criterion is met,
wherein:
a pixel of the detector image corresponds to more than one node of the second calculation plane, and
during the update the measured intensity of each detector pixel is made to match the intensity of the corresponding number of nodes.

12 more elements

Dependencies are inferred from the claim text.

Description5,765 words

Summary2,466 words

#The invention relates to a method of ptychographic imaging, the method comprising:

#providing an object in an object plane

#providing a pixelated detector in a detector plane, the detector plane conjugated to the object plane by a Fresnel propagator, the detector equipped to detect the intensity of a wave front,

Brief description of the drawings11 figures

#To that end:

#FIG. 1 schematically shows an apparatus for ptychography,

#FIG. 2A schematically shows a prior art flowchart for ptychographic imaging,

Detailed description3,020 words

#FIG. 1 schematically shows an apparatus for ptychography.

#FIG. 1 shows a radiation source 102 forming a beam of radiation 106. The beam of radiation is manipulated (focused) by probe forming means 104. An input wave front 108 is formed on an object 110. The output wave of the radiation that traveled through the object propagates to a pixelated detector 114, where the amplitude of the resulting detector wave front (112) is detected.

#By repeatedly acquiring an image of a part of the object, each part overlapping with at least one other part, a set of images is acquired that can be used by a mathematical process for reconstructing the object.

Facts

Application

15/186,267Filed 17 Jun 2016

Priority

EP 1517275218 Jun 2015

Published

US 2017/0024908 A126 Jan 2017

Granted

1 May 2018

Term ends

24 Oct 2036

Estimated · how

20 years from earliest known nonprovisional domestic filing plus recorded patent term adjustment, including 129 days of adjustment. Maintenance-fee lapses, terminal disclaimers and statutory extensions have not been checked. The continuity chain may be incomplete; this is not an enforceability determination.

Classification12 codes

G01N 23/041
And forming images of the material: phase-contrast imaging, e.g. using grating interferometers
G01T 1/17
Measuring radiation intensity: circuit arrangements not adapted to a particular type of detector
G02B 21/008
Confocal scanning microscopes or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders: details of…
G06T 11/00
Two-dimensional [2d] image generation

Timeline

18 Jun 2015Priority claimedEP 15172752
17 Jun 2016Application filedUS 15/186,267
18 Jul 2016Assigned to Fei Companyassignment of assignor's interest
26 Jan 2017PublishedUS 2017/0024908 A1
1 May 2018GrantedUS 9,959,639 B2
12 Oct 2026TodayWithin its term
24 Oct 2036Term endsEstimated, includes 129 days of adjustment

Method of ptychographic imaging

Life of this patent

Method of ptychographic imaging

Life of this patent

Life of this patent

Abstract

Drawings

Drawings

Claims20

Description5,765 words

Drawings

Classification12 codes

Life of this patent

Description5,765 words