Method and apparatus for manufacturing single crystal
AssigneeSumco Corporation
InventorKen Hamada
Life of this patent
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Abstract
Disclosed herein is a method for manufacturing a single crystal, the method includes: photographing an image of a boundary portion between the single crystal and a melt by a camera during a single crystal pull-up process according to a Czochralski method; comparing at least one pixel included in a left side region with respect to an extension line of a pull-up shaft of the single crystal and at least one pixel included in a right side region with respect to the extension line; and determining an abnormality in a luminance distribution of the image from a result of the comparing.
Claims10
A method for manufacturing a single crystal comprising:
- photographing an image of a boundary portion between the single crystal and a melt by a camera during a single crystal pull-up process according to a Czochralski method;
- comparing at least one pixel included in a left side region with respect to an extension line of a pull-up shaft of the single crystal and at least one pixel included in a right side region with respect to the extension line;
- and
- determining an abnormality in a luminance distribution of the image from a result of the comparing,
- wherein the luminance distribution of the image is determined to be abnormal when a luminance difference between a first maximum luminance in the left side region and a second maximum luminance in the right side region is equal to or larger than a threshold.
An apparatus for manufacturing a single crystal comprising:
- a chamber provided with an observation window;
- a crucible supporting a melt in the chamber;
- a pull-up shaft pulling up the single crystal from the melt;
- a camera that photographs an image of a boundary portion between the single crystal and the melt through the observation window;
- and
- an image processing section that processes the image photographed by the camera,
- wherein the image processing section determines an abnormality in a luminance distribution of the image from a result of comparison between at least one pixel included in a left side region with respect to an extension line of the pull-up shaft and at least one pixel included in a right side region with respect to the extension line, and
- wherein the image processing section determines that the luminance distribution of the image is determined to be abnormal when a luminance difference between a first maximum luminance in the left side region and a second maximum luminance in the right side region is equal to or larger than a threshold.
Dependencies are inferred from the claim text.