US 9,959,451 B2 · Image inspection device, image inspection method and image inspection program

Abstract

Provided is an image inspection device, an image inspection method and an image inspection program which are capable of easily and accurately inspecting a shape of an inspection target. In a setting mode, positioning image data of a setting target placed on a stage is registered. In an inspection mode, a positioning image is displayed on a display part based on the positioning image data. An image for positioning of the inspection target placed on the stage is displayed in the display part. Thereafter, image data for alignment of the inspection target is acquired, and then aligned to image data for alignment of the setting target. A size in a height direction of a measurement target place of the inspection target is measured based on the aligned height image data, to determine Pass/Fail of the inspection target. The determined determination result is displayed on the display unit.

An image inspection device comprising:

a camera;
a stage on which a measurement target is to be placed;
a first image data acquisition part which acquires, by the camera, first image data representing a texture image of the surface of the measurement target placed on the stage;
a second image data acquisition part which acquires, by the camera, second image data representing a height image of the surface of the measurement target placed on the stage;
a controller which performs control operation in a setting mode to make setting for inspection and in an inspection mode to perform inspection;
and
a display,
wherein the controller includes in the setting mode,
a first acquisition command part which gives a command to the first or second image data acquisition part to acquire first or second image data for positioning in a state where a setting target is placed on the stage,
a first registration part providing positioning image data showing a position and a posture of the setting target based on the command of the first acquisition command part,
a second acquisition command part providing a command to the first or second image data acquisition part to acquire first or second image data for alignment in the state where the setting target is placed on the stage,
a second registration part providing as reference image data the image data for alignment which is acquired by the command of the second acquisition command part,
a third acquisition command part providing a command to the second image data acquisition part to acquire second image data for measurement in the state where the setting target is placed on the stage,
a first measurement part which measures a size in a height direction of a measurement target portion of the setting target based on the second image data for measurement,
an acceptance part which accepts input of at least either value of a design value or a tolerance of the measurement target portion of the setting target, in the inspection mode,
a first display command part which gives a command to the display to display a positioning image based on the positioning image data,
a fourth acquisition command part which gives a command to the first or second image data acquisition part to acquire first or second image data for positioning in a state where an inspection target is placed on the stage,
a second display command part which gives a command to the display to display an image based on the image data for positioning which is acquired in the inspection mode,
a fifth acquisition command part which gives a command to the first or second image data acquisition part to acquire image data for alignment which corresponds to the reference image data after the command by the first and second display command parts,
a third registration part which registers, as alignment image data, the image data for alignment in the inspection mode,
a sixth acquisition command part which gives a command to the second image data acquisition part to acquire second image data for measurement in the state where the inspection target is placed on the stage,
an alignment part which aligns the second image data acquired by the command of the sixth acquisition command part by alignment of the alignment data and the reference image data with pattern matching,
a second measurement part which measures a size of a measurement target place of the inspection target which corresponds to a measurement target place of the setting target based on the second image data for measurement,
a determination part which determines Pass/Fail of the inspection target based on the size measured by the first measurement part, the size measured by the second measurement part, and at least either value of the design value or the tolerance accepted by the acceptance part, and
a third display command part which gives a command to the display to display the determination result determined by the determination part.

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Image inspection device, image inspection method and image inspection program

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Image inspection device, image inspection method and image inspection program

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Abstract

Claims15