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US 9,959,004 B2Granted
Deformation sensor
AssigneeMicrosoft Technology Licensing, LLC
InventorsJouko Juho Kalevi Lång, Vicente Calvo Alonso
Life of this patent
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Abstract
A deformation sensor comprises at least two electrodes on the surface of a substrate. The electrodes are separated by a gap, and the electrodes are arranged so that the gap comprises at least a part of a closed geometric shape. The gap contains a material loaded with conductive or semiconductive nanoparticles, whereby deformation of the substrate causes the resistance between the at least two electrodes to change.
Claims18
A deformation sensor comprising:
- a substrate;
- and
- at least two electrodes on a surface of the substrate and separated by a gap, the electrodes being arranged to substantially surround the gap so that the gap comprises at least one part of a geometric shape and at least one electrode is inside the gap;
- the at least one part of a geometric shape of the gap containing a material loaded with conductive or semiconductive nanoparticles so that the at least two electrodes are electrically connected only by the material;
- whereby deformation of the substrate between two of the at least two electrodes causes a resistance between the two of the at least two electrodes to change, the resistance being measured between the electrodes of the sensor and across the gap;
- wherein each electrode of the at least two electrodes comprises a plurality of outwardly extending spaced apart fingers in which the outwardly extending spaced apart fingers of different electrodes of the at least two electrodes are interleaved;
- whereby the gap is formed of respective gaps that are defined between the interleaved fingers of the different electrodes.
4 more elements
A method of manufacturing a sensor, the method comprising:
- forming at least two electrodes on a surface of a substrate, the at least two electrodes being separated by a gap and the at least two electrodes being arranged to substantially surround the gap so that the gap comprises at least a part of a geometric shape and at least one electrode is inside the gap;
- and
- depositing a material loaded with conductive or semiconductive nanoparticles on the surface of the substrate;
- wherein the at least a part of a geometric shape of the gap contains the material loaded with conductive or semiconductive nanoparticles so that the at least two electrodes are electrically connected only by the material;
- whereby deformation of the substrate between two of the at least two electrodes causes a resistance between the two of the at least two electrodes to change, the resistance being measured between the electrodes of the sensor and across the gap;
- wherein each electrode of the at least two electrodes comprises a plurality of outwardly extending spaced apart fingers in which the outwardly extending spaced apart fingers of different electrodes of the at least two electrodes are interleaved;
- whereby the gap is formed of respective gaps that are defined between the interleaved fingers of the different electrodes.
4 more elements
A deformation sensor comprising:
- a substrate;
- and
- at least two electrodes on a surface of the substrate and separated by a gap, the electrodes being arranged to substantially surround the gap so that the gap comprises at least one circular arc and at least one electrode is inside the gap;
- the at least one circular arc of the gap containing a material loaded with conductive or semiconductive nanoparticles so that the at least two electrodes are electrically connected only by the material;
- whereby deformation of the substrate between two of the at least two electrodes causes a resistance between the two of the at least two electrodes to change, the resistance being measured between the electrodes of the sensor and across the gap;
- wherein each electrode of the at least two electrodes comprises a plurality of outwardly extending spaced apart fingers in which the outwardly extending spaced apart fingers of different electrodes of the at least two electrodes are interleaved;
- whereby the gap is formed of respective gaps that are defined between the interleaved fingers of the different electrodes.
4 more elements
Dependencies are inferred from the claim text.