Electro discharge machining system with batch processing of holes and manufacturing method therefor
AssigneeApplied Materials, Inc.
InventorFatih Mert Ozkeskin
Life of this patent
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Abstract
An electro discharge machining system, and manufacturing method therefor, including: providing an electro discharge machining unit and control; providing a workpiece holder; providing a tool holder for a tool having an electrode array; and operatively connecting the workpiece holder and the tool holder to the electro discharge machining unit and control for batch electro-discharge machining of a workpiece to a configuration compatible with the electrode array.
Claims19
A method of operating an electro discharge machining system comprising:
- providing an electro discharge machining unit and control;
- providing a workpiece holder;
- providing a tool holder holding a tool having an electrode array, the tool specially made to form through silicon vias;
- providing a container containing non-dielectric fluid to submerge the workpiece and the tool in the non-dielectric fluid;
- and
- operatively connecting the workpiece holder and the tool holder to the electro discharge machining unit and control and batch electro-discharge machining an array of through holes in a silicon workpiece.
An electro discharge machining system comprising:
- an electro discharge machining unit and control;
- a workpiece holder;
- a tool holder holding a tool having an electrode array, the tool specially made to form through silicon vias;
- a container containing non-dielectric fluid to submerge the workpiece and the tool in the non-dielectric fluid;
- and
- wherein the workpiece holder and the tool holder are operatively connected to the electro discharge machining unit and control to batch electro-discharge machine an array of through holes in a silicon workpiece.
A method of operating an electro discharge machining system comprising:
- providing a micro electro discharge machining unit and control to provide and control an electro discharge;
- providing a workpiece holder to hold a workpiece;
- providing a tool holder holding a tool having an electrode array including a plurality of parallel electrodes, the tool specially made to form through silicon vias;
- providing a container containing non-dielectric chemical fluid to submerge the workpiece and the tool in the non-dielectric chemical fluid;
- and
- operatively connecting the workpiece holder and the tool holder to the electro discharge machining unit and control and batch electro-discharge machining an array of through holes in a silicon workpiece.
Dependencies are inferred from the claim text.