Spacer displacement device for a wafer illumination unit and wafer illumination unit
AssigneeSuss Microtec Lithography GmbH
InventorsMatthias Conradi, Janusz Schulz
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Abstract
A spacer displacement device for a wafer illumination unit comprises an actuator, a spacer which can be displaced between an active and an inactive position by the actuator, and a force transmission element which is coupled to the actuator. The force transmission element consists of wire.
Claims24
A spacer displacement device for a wafer illumination unit, comprising an actuator, a spacer which can be displaced from an active position to an inactive position and from the inactive position to the active position by said actuator, and a force transmission element which is coupled to said actuator, said force transmission element consisting of directed wire.
A wafer illumination unit comprising a spacer displacement device, said spacer displacement device comprising a spacer which can be displaced between an active and an inactive position by said actuator, and a force transmission element which is coupled to said actuator, said force transmission element consisting of directed wire.
Dependencies are inferred from the claim text.