Reticle pod
AssigneeGudeng Precision Industrial Co., Ltd.
InventorsHsin-Min Hsueh, Chia-Ho Chuang, Cheng-Ju Lee, Jeng-Jie Huang
Life of this patent
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Abstract
A reticle pod is provided for receiving a reticle, the reticle pod comprises: a plurality of positioning modules, which are disposed on at least one vertex portions of a substrate of the reticle pod. The positioning module includes an elastic member, and an abutting member which disposed above the positioning module, wherein when the reticle is received in the reticle pod and the cover of the reticle pod is engaged to the substrate, the cover contacts and provides a downward pressure to the abutting member, and forcing the abutting member to compress the elastic member. The compressed elastic member deforms extensively along a transverse direction and contacts with the reticle.
Claims11
A reticle pod for receiving a reticle, which comprises:
- a base having four vertex portion;
- a cover corresponding to the base and engaging with respect to the base;
- and
- at least one positioning modules disposed on at least one of the vertex portion, the positioning module comprises:
- a soft member;
- and
- an abutting member disposed above the soft member;
- wherein the reticle is received in the reticle pod and the cover is engaged with the base, the cover contacts the abutting member and provides a downward pressure against the abutting member;
- the abutting member is driven to compress the soft member in a longitudinal direction, so that a force is applied to the soft member and the soft member is deformed in a horizontal direction and contacts to the reticle.
Dependencies are inferred from the claim text.