Highly-reflective liquid crystal on silicon panel comprising a continuous reflective coating covering pixel electrodes and an inter-pixel coating
AssigneeOmniVision Technologies, Inc.
InventorChun-Sheng Fan
Life of this patent
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Abstract
A highly-reflective liquid crystal on silicon (LCOS) panel includes pixel electrodes on a substrate, each pixel electrode having a top surface with a first reflectivity. A continuous reflective coating covers the pixel electrodes and substrate surfaces therebetween, forming a plurality of coated pixel electrodes having an enhanced reflectivity that exceeds the first reflectivity. A method for increasing pixel reflectivity in a LCOS panel includes depositing a continuous reflective coating covering both (1) a plurality of pixel electrodes on a substrate and (2) a plurality of inter-pixel substrate surfaces, and depositing a layer on the continuous reflective coating.
Claims6
A highly-reflective liquid crystal on silicon (LCOS) panel comprising:
- pixel electrodes on an isolation layer, each pixel electrode having a top surface, at a first height above the isolation layer, and each pixel electrode having a first reflectivity;
- and
- a continuous reflective coating covering the pixel electrodes and surfaces of the isolation layer therebetween, forming a plurality of coated pixel electrodes having an enhanced reflectivity that exceeds the first reflectivity;
- and
- on isolation layer regions between adjacent pixel electrodes, an inter-pixel coating between the isolation layer and the continuous reflective coating, the inter-pixel coating having a second height equal to the first height such that the inter-pixel coating and pixel electrodes form a planar surface.
Dependencies are inferred from the claim text.