Semiconductor device having multiple insulating films of varying thickness
AssigneeJapan Display Inc.
InventorsYuki Matsuura, Osamu Itou
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Abstract
According to one embodiment, a display device includes an insulating substrate, a first insulating film, a second insulating film, a third insulating film, a fourth insulating film, a fifth insulating film, a sixth insulating film, a color filter layer, a semiconductor layer disposed between the second insulating film and the third insulating film, and a gate electrode disposed between the third insulating film and the fourth insulating film, wherein the first, fourth, and sixth insulating films are formed of a silicon nitride, and the second, third, and fifth insulating films are formed of a silicon oxide.
Claims4
A display device comprising:
- an insulating substrate;
- a first insulating film disposed on the insulating substrate;
- a second insulating film disposed on the first insulating film;
- a third insulating film disposed on the second insulating film;
- a fourth insulating film disposed on the third insulating film;
- a fifth insulating film disposed on the fourth insulating film;
- a sixth insulating film disposed on the fifth insulating film;
- a color filter layer disposed on the sixth insulating film;
- a semiconductor layer disposed between the second insulating film and the third insulating film;
- a gate electrode disposed between the third insulating film and the fourth insulating film;
- and
- a source electrode disposed between the fifth insulating film and the sixth insulating film and electrically connected to the semiconductor layer, wherein
- the first, fourth, and sixth insulating films are formed of a silicon nitride,
- the second, third, and fifth insulating films are formed of a silicon oxide,
- the color filter layer includes a first color filter layer and a second color filter layer,
- a thickness of the sixth insulating film in an area opposed to the first color filter layer is different from a thickness of the sixth insulating film in an area opposed to the second color filter layer,
- the first color filter layer is red, and the second color filter layer is blue,
- the fourth insulating film is 490±10 nm in thickness,
- the fifth insulating film is 370±10 nm in thickness,
- the sixth insulating film in an area opposed to the red color filter layer is 300±10 nm in thickness, and
- the sixth insulating film in an area opposed to the blue color filter layer is 110±10, 220±10, or 330±10 nm in thickness.
Dependencies are inferred from the claim text.