Optical scanner, manufacturing method of optical scanner, image display device, and head mounted display
AssigneeSeiko Epson Corporation
InventorYasushi Mizoguchi
Life of this patent
Estimating the term…
Abstract
An optical scanner includes a first Si layer, a second Si layer, and an SiO2 layer present between the Si layers. The optical scanner includes a movable section and shaft sections formed from the first Si layer, a holding section formed from the second Si layer and disposed to be separated from the movable section, a coupling section formed from the SiO2 layer and configured to couple the movable section and the holding section, and a light reflecting section provided on the upper surface of the holding section and configured to reflect light. The movable section and the coupling section are joined by direct joining.
Claims20
An optical scanner comprising:
- a first Si layer;
- a first SiO2 layer;
- a second Si layer,
- the first Si layer, the first SiO2 layer, and the second Si layer being formed in a layer structure in which the first Si layer, the first SiO2 layer, and the second Si layer are stacked in this order,
- the second Si layer including a movable section and a shaft section configured to support the movable section for swinging around a swing axis,
- the first Si layer including a holding section, and
- the first SiO2 layer including a coupling section configured to couple the movable section and the holding section;
- and
- a light reflecting section provided on a surface side opposite to a surface of the holding section on which the coupling section is provided, the light reflecting section reflecting light, wherein
- the movable section and the coupling section are joined by direct joining.
A manufacturing method of an optical scanner including
- a movable section,
- a shaft section configured to support the movable section for swinging around a swing axis,
- a holding section disposed to be separated from the movable section in a thickness direction of the movable section,
- a coupling section located between the movable section and the holding section and configured to couple the movable section and the holding section, and
- a light reflecting section provided on a surface side opposite to a surface of the holding section on which the movable section is provided, the light reflecting section reflecting light,
- the manufacturing method comprising:
- preparing a first substrate on which a first Si layer and a first SiO2 layer are stacked and forming the coupling section from the first SiO2 layer;
- preparing a second substrate including a second Si layer and directly joining the coupling section of the first substrate and the second Si layer of the second substrate;
- patterning, from a surface side opposite to a surface on which the first substrate is provided, the second Si layer to form the movable section and the shaft section;
- patterning, from a surface side opposite to a surface on which the second substrate is provided, the first Si layer to form the holding section;
- and
- disposing the light reflecting section in the holding section.
A manufacturing method of an optical scanner including
- a movable section,
- a shaft section configured to support the movable section for swinging around a swing axis,
- a holding section disposed to be separated from the movable section in a thickness direction of the movable section,
- a coupling section located between the movable section and the holding section and configured to couple the movable section and the holding section, and
- a light reflecting section provided on an opposite side of a surface of the holding section on which the coupling section is provided, the light reflecting section reflecting light,
- the manufacturing method comprising:
- preparing an SOI substrate including a first Si layer, a second Si layer, and a first SiO2 layer provided between the first Si layer and the second Si layer, the coupling section being formed from the first SiO2 layer;
- patterning, from a surface side opposite to a surface on which the first Si layer is provided, the second Si layer to form the movable section and the shaft section;
- patterning, from a surface side opposite to a surface on which the second Si layer is provided, the first Si layer to form the holding section;
- and
- disposing the light reflecting section in the holding section.
Dependencies are inferred from the claim text.