Scanning system and method for scanning an object
AssigneeApplied Materials Israel Ltd.
InventorsRon Naftail, Boris Golberg, Rami Elichai
Life of this patent
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Abstract
A scanning system that includes an illumination module that is configured to scan, at a first direction, an elongated radiation spot over an object; and a collection module that is configured to (a) collect a collected radiation beam from the object, and (b) optically manipulate the collected radiation beam to provide a counter-scan beam is directed towards a set of detection units and has a focal point that is positioned at a same location regardless of the propagation of the elongated radiation spot along the first direction.
Claims15
A scanning system, comprising:
- an illumination module that is configured to scan, at a first direction, an elongated radiation spot over an object;
- and
- a collection module that is configured to (a) collect a collected radiation beam from the object, and (b) optically manipulate the collected radiation beam to provide a counter-scan beam that is directed towards a set of detection units and has a focal point that is positioned at a same location regardless of a propagation of the elongated radiation spot along the first direction.
A method for scanning an object, the method comprising:
- scanning, by an illumination module and at a first direction, an elongated radiation spot over an object;
- collecting, by a collection module, a collected radiation beam from the object;
- and
- optically manipulating the collected radiation beam to provide a counter-scan beam that is directed towards a set of detection units and has a focal point that is positioned at a same location regardless of a propagation of the elongated radiation spot along the first direction.
Dependencies are inferred from the claim text.