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US 9,958,609 B2Granted
Method of manufacturing nano antenna
AssigneeSamsung Electronics Co., Ltd.
InventorsChangbum Lee, Duhyun Lee, Sunil Kim, Jungwoo Kim, Byunggil Jeong
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Abstract
A method of manufacturing a nano antenna is provided. The method includes forming a material layer on a substrate, defining a portion of the material layer, forming an adhesion layer on the defined portion of the material layer, forming a nano antenna material layer on the adhesion layer, and removing the adhesion layer to thereby manufacture the nano antenna.
Claims6
A method of manufacturing a nano antenna, the method comprising:
- forming a material layer on a substrate;
- defining a portion of the material layer;
- forming an adhesion layer on the defined portion of the material layer;
- forming a nano antenna material layer on the adhesion layer;
- and
- removing the adhesion layer from underneath the nano antenna material layer formed thereon without removing the nano antenna material layer formed thereon.
3 more elements
A method of manufacturing a nano antenna, the method comprising:
- forming a material layer on a substrate;
- forming a mask on the material layer, wherein the mask exposes a defined portion of the material layer;
- forming an adhesion layer on the defined portion of the material layer, while the mask is present;
- forming a nano antenna material layer on the adhesion layer, while the mask is present;
- removing the mask;
- and
- removing the adhesion layer subsequent to the removing the mask.
4 more elements
Dependencies are inferred from the claim text.