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US 9,958,607 B2Granted
Light waveguide, method of manufacturing light waveguide, and light waveguide device
AssigneeShinko Electric Industries Co., Ltd.
InventorKenji Yanagisawa
Life of this patent
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Abstract
A light waveguide includes a first cladding layer, a groove formed in the first cladding layer, a core layer embedded in the groove, and a second cladding layer formed on the first cladding layer and the core layer. A width and thickness of one end of the core layer are larger than a width and thickness of the other end of the core layer.
Claims9
A light waveguide comprising:
- a first cladding layer;
- a groove formed in the first cladding layer;
- a core layer embedded in the groove;
- and
- a second cladding layer formed on the first cladding layer and the core layer,
- wherein a width and thickness of one end of the core layer are larger than a width and thickness of the other end of the core layer,
- wherein an upper surface of the core layer is a horizontal surface, and a thickness of the second cladding layer along a direction crossing a light propagating direction is constant across an entire width of the second cladding layer, and
- wherein the thickness of the second cladding layer is measured in a thickness direction between a first surface of the second cladding layer that faces the first cladding layer and a second surface of the second cladding layer opposite to the first surface, and the width of the second cladding layer is measured in a width direction perpendicular to the thickness direction and the light propagating direction.
5 more elements
A light waveguide device comprising:
- a light waveguide which includes a first cladding layer, a groove formed in the first cladding layer, a core layer embedded in the groove, and a second cladding layer formed on the first cladding layer and the core layer, and in which a width and thickness of one end of the core layer are larger than a width and thickness of the other end of the core layer, an upper surface of the core layer is a horizontal surface, and a thickness of the second cladding layer along a direction crossing a light propagating direction is constant across an entire width of the second cladding layer, wherein the thickness of the second cladding layer is measured in a thickness direction between a first surface of the second cladding layer that faces the first cladding layer and a second surface of the second cladding layer opposite to the first surface, and the width of the second cladding layer is measured in a width direction perpendicular to the thickness direction and the light propagating direction;
- a first optical fiber or an optical element optically coupled with the one end of the core layer of the light waveguide;
- and
- a second optical fiber optically coupled with the other end of the core layer.
1 more element
A light waveguide device comprising:
- a wiring substrate;
- a light waveguide which is formed on the wiring substrate, and includes a first cladding layer, a groove formed in the first cladding layer, a core layer embedded in the groove, and a second cladding layer formed on the first cladding layer and the core layer, and in which a width and thickness of one end of the core layer are larger than a width and thickness of the other end of the core layer;
- a light path conversion mirror optically coupled with the one end of the core layer of the light waveguide;
- an optical element connected to the wiring substrate and optically coupled with the one end of the core layer through the light path conversion mirror;
- and
- an optical fiber optically coupled with the other end of the core layer.
3 more elements
A method of manufacturing a light waveguide comprising:
- forming a first cladding layer on a substrate;
- forming a groove in the first cladding layer such that a width and depth of one end are larger than a width and depth of the other end;
- forming a core layer in the groove such that the core layer is embedded;
- and
- forming a second cladding layer on the first cladding layer and the core layer,
- wherein a width and thickness of the one end of core layer are larger than a width and thickness of the other end of the core layer, and
- wherein:
- the forming the groove includes:
- preparing a mask having a light-passing part having a longitudinal shape in which a width of one end is larger than a width of the other end, and a shield plate;
- disposing the mask on the first cladding layer, and shielding the light-passing part of the mask with the shield plate;
- and
- irradiating the first cladding layer with a laser through the light-passing part which is exposed from the shield plate while moving the shield plate at a constant speed from the one end of the light-passing part of the mask toward the other end.
9 more elements
Dependencies are inferred from the claim text.