Defect isolation methods and systems
AssigneeGlobalfoundries Singapore Pte. Ltd.
InventorsSzu Huat Goh, Yin Hong Chan, Boon Lian Yeoh, Jeffrey Chor Keung Lam, Lin Zhao
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AssigneeGlobalfoundries Singapore Pte. Ltd.
InventorsSzu Huat Goh, Yin Hong Chan, Boon Lian Yeoh, Jeffrey Chor Keung Lam, Lin Zhao
Estimating the term…
A test system for testing devices is disclosed. The test system includes a scanning microscope module and a test module. The scanning microscope module, when testing a device under test (DUT), is configured to perturb the DUT with a laser at a test (pixel) location. The test module includes a tester unit, a reference failure log containing prior failing compare vectors of interest, and a comparator unit which includes a software comparator. The tester unit is configured to perform a test run at the test location of the DUT with a test pattern. If the test run fails testing, the tester unit is configured to compare using the comparator unit to determine if failing test vectors of the test run matches a desired failure signature, and to generate a comparator trigger pulse if failing test vectors match the prior failure signature. The trigger pulse indicates that the test location of the DUT is a failed location.
A test system for testing devices comprising:
A test system for testing devices comprising:
The system of 9 wherein the inputs are provided by users to modify the original sort test pattern based on prior reference failure log.
The system of 10 wherein the test pattern manipulator manipulates manipulations to define failure signature and generate a technical test pattern, wherein the manipulations comprise
The system of 11 wherein the technical test pattern is employed to test the DUT by the tester unit.
A method of testing a device under test (DUT) comprising:
The method of 17 wherein the UI configuration page further comprises
The method of 18 comprises
Dependencies are inferred from the claim text.