System for electrical measurements of objects in a vacuumed environment
AssigneeApplieed Materials Israel Ltd.
InventorsAmir Wachs, Alon Litman, Efim Vinnitsky
Life of this patent
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Abstract
A system for electrically testing an object, the system may include a scanning electron microscope that comprises a column; and nano-probe modules that are mechanically connected to the column; wherein the column is configured to illuminate areas of the object, with a beam of charged particles; wherein nano-probes of the nano-probe modules are configured to electrically contact elements of the object, during electrical tests of the object, wherein the elements of the object are located within the areas of the object.
Claims16
A system for electrically testing an object, the system comprising:
- a vacuum chamber;
- an object support configured to support and move an object within the vacuum chamber during an electrical testing operation;
- a scanning electron microscope that comprises a column configured to illuminate areas of the object with a beam of charged particles while the object is positioned on the object support during an electrical testing operation, the column including one or more stabilizing elements;
- a plurality of nano-probe modules mechanically connected to and positioned in a concentric arrangement with the column within the chamber, the plurality of nano-probe modules comprising a plurality of nano-probes that are configured to electrically contact elements of the object during the electrical testing operation and a plurality of nano-probe motors configured to move the nano-probes in relation to the column;
- and
- a shield positioned between the plurality of nano-probe motors and the object support and having an aperture aligned with the column through which the nano-probes may contact the object, wherein the shield is configured to reduce contamination as a result of operation of the nano-probe motors.
A system for electrically testing an object, the system comprising:
- a vacuum chamber;
- a object support configured to support a object within the vacuum chamber and move the object in a plurality of dimensions;
- a scanning electron microscope that comprises a fixed and stable column configured to illuminate areas of the object with a beam of charged particles during an imaging process;
- a plurality of detachable nano-probe modules arranged concentric with the column, wherein each nano-probe module is detachably connected to the column and includes a nano-probe motor and a nano-probe configured to electrically contact elements of the object during electrical tests of the object;
- and
- a shield positioned between the nano-probe motors and the object support and having an aperture aligned with the column through which the nano-probes may contact the object, wherein the shield is configured to reduce contamination as a result of operation of the nano-probe motors.
Dependencies are inferred from the claim text.