Testing machine and operation method thereof

#This application claims priority to Taiwan Application Serial Number 104107766, filed Mar. 11, 2015, which is herein incorporated by reference.

#Technical Field

#The present disclosure relates to a testing machine. More particularly, the present disclosure relates to a testing machine which allows the probe to touch the device under test (DUT) slowly.

#The disclosure can be more fully understood by reading the following detailed description of the embodiments, with reference made to the accompanying drawings as follows:

#FIG. 1 is a front view of a testing machine according to an embodiment of the present disclosure;

#FIG. 2 is a side view of the control lever and the damper of the testing machine of FIG. 1;

#Drawings will be used below to disclose embodiments of the present disclosure. For the sake of clear illustration, many practical details will be explained together in the description below. However, it is appreciated that the practical details should not be used to limit the claimed scope. In other words, in some embodiments of the present disclosure, the practical details are not essential. Moreover, for the sake of drawing simplification, some customary structures and elements in the drawings will be schematically shown in a simplified way. Wherever possible, the same reference numbers are used in the drawings and the description to refer to the same or like parts.

#Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and the present disclosure, and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

#Reference is made to FIGS. 1-2. FIG. 1 is a front view of a testing machine 100 according to an embodiment of the present disclosure. FIG. 2 is a side view of the control lever 150 and the damper 160 of the testing machine 100 of FIG. 1. As shown in FIGS. 1-2, a testing machine 100 includes a base 110, a testing platform 120, a probe platform 130, a control lever 150, a temporary positioning mechanism 190 and a damper 160. The testing platform 120 is connected with the base 110. The testing platform 120 is configured to carry a device under test (DUT) 200. The probe platform 130 is connected with the base 110. The probe platform 130 is able to move along a longitudinal direction D1 relative to the testing platform 120, and the probe platform 130 is configured to connect with at least one probe 300. The probe 300 corresponds to the device under test 200. The control lever 150 is connected with the base 110 and the probe platform 130. Through operating the control lever 150, the probe platform 130 is driven by the control lever 150 to move along the longitudinal direction D1 relative to the testing platform 120. The temporary positioning mechanism 190 is connected with the control lever 150. The temporary positioning mechanism 190 is configured to temporarily hold the probe platform 130 and the control lever 150 at a specific position P. The damper 160 is connected with the base 110. When a distance X between the probe 300 and the device under test 200 along the longitudinal direction D1 is shorter than a buffering distance, the damper 160 at least partially abuts against the control lever 150, so as to reduce a velocity of the probe 300 moving towards the device under test 200. In this embodiment, the testing platform 120 can be a vacuum suction cup, and the device under test 200 can be a semiconductor wafer or a light emitting diode (LED) wafer. In addition, for the sake of convenient illustration, the figures of this embodiment are not drawn in true scale. Furthermore, the temporary positioning mechanism 190 is not obvious when practically viewed from the front direction.