Method of identifying airborne molecular contamination source
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTzu-Sou Chuang, Jeng-Jyi Hwang, Cheng-Lung Chou, Chi-Ming Yang, Chin-Hsiang Lin
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Abstract
The present disclosure provides a method of identifying an airborne molecular contamination (AMC) leaking source in a fab. The method includes distributing a sensor in the fab, executing a forward computational fluid dynamics (CFD) simulation of an air flow in the fab, setting an inversed modeling of the forward CFD simulation of the air flow in the fab, building up a database of a spatial response probability distribution matrix of the sensor using an AMC measurement data in the fab, and identifying the AMC leaking source using the database of the spatial response probability distribution matrix of the sensor.
Claims20
A method of identifying an airborne molecular contamination (AMC) leaking source in a fab, the method comprising:
- determining a minimum number of AMC sensors needed to collect AMC measurement data for all areas of the fab;
- distributing the minimum number of AMC sensors in the fab;
- connecting the AMC sensors to an AMC monitor having an alarm;
- using a computer, building a database of spatial response probability distribution matrices of the AMC sensors using a unit AMC value at locations of the AMC sensors;
- and
- upon a condition that the alarm is triggered by the AMC sensors, collecting AMC measurement data from the AMC sensors, and identifying an AMC leaking source using the AMC measurement data and the database without running a real-time inverse CFD simulation during the collection of AMC measurement data.
A method of identifying an airborne molecular contamination (AMC) source in a fab, the method comprising:
- determining a minimum number of AMC sensors needed to collect AMC measurement data for all areas of the fab;
- distributing the minimum number of AMC sensors in the fab;
- connecting the AMC sensors to a computational fluid dynamics (CFD) system;
- storing a database of spatial response probability distribution matrices with respect to the AMC sensors using the CFD system and a unit AMC value at locations of the AMC sensors;
- and
- monitoring the fab using the AMC sensors without running a real-time inverse CFD simulation during the collection of AMC measurement data.
A system for identifying an airborne molecular contamination (AMC) leaking source in a fab, the system comprising:
- an AMC controller;
- a number of sensors connected to the AMC controller, the number of sensors being a minimum number of sensors needed to collect AMC measurement data for all areas of the fab;
- and
- a storage unit integrated to the AMC controller, wherein the storage unit is configured to store a database of spatial response probability distribution matrices of the sensors derived from a forward computational fluid dynamics (CFD) simulation and an inverse CFD simulation of an air flow in the fab with a unit AMC value at locations of the sensors.
Dependencies are inferred from the claim text.