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US 9,958,415 B2Granted
ChemFET sensor including floating gate
AssigneeLife Technologies Corporation
InventorsJonathan M. Rothberg, Todd Rearick
Life of this patent
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Abstract
Methods and apparatus relating to FET arrays including large FET arrays for monitoring chemical and/or biological reactions such as nucleic acid sequencing-by-synthesis reactions. Some methods provided herein relate to improving signal (and also signal to noise ratio) from released hydrogen ions during nucleic acid sequencing reactions.
Claims11
A chemical sensor, comprising:
- a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface;
- a dielectric material defining an opening extending to the upper surface of the floating gate conductor;
- and
- an electrode capacitively coupled to the floating gate conductor;
- wherein an electrically conductive material is disposed on the upper surface of the floating gate conductor and wherein the dielectric material defines a sidewall of the opening, and the electrically conductive material extends incompletely up the sidewall.
2 more elements
Dependencies are inferred from the claim text.