Imaging apparatus and imaging method
AssigneeKabushiki Kaisha Toshiba
InventorsTakeshi Yamane, Tsuneo Terasawa
Life of this patent
Estimating the term…
Abstract
According to one embodiment, an imaging apparatus includes a light source for illumination, a stage on which an imaging object illuminated by illumination light from the light source is to be placed, a critical illumination optical system configured to supply the illumination light to the imaging object placed on the stage, and to have a greater magnification in a first axis direction than in a second axis direction, an imaging optical system configured to form an image of the imaging object placed on the stage and illuminated using the critical illumination optical system, and a detector configured to detect the image of the imaging object formed by the imaging optical system, and to have a detection area longer in the first axis direction than in the second axis direction.
Claims10
An imaging apparatus comprising:
- a light source for illumination;
- a stage on which an imaging object illuminated by illumination light from the light source is to be placed;
- a critical illumination optical system configured to supply the illumination light from the light source to the imaging object placed on the stage, and to have a greater magnification in a first axis direction than in a second axis direction perpendicular to the first axis direction;
- an imaging optical system configured to form an image of the imaging object placed on the stage and illuminated using the critical illumination optical system;
- an elliptical arc shape mirror and a linear mirror, the elliptical arc shape mirror being arranged closer to the light source along the first axis direction than the second axis direction;
- and
- a detector configured to detect the image of the imaging object formed by the imaging optical system, the detector having a detection area longer in the first axis direction than in the second axis direction, and including a plurality of pixels arrayed in the first axis direction.
An imaging method comprising:
- supplying illumination light from a light source to an imaging object placed on a stage using a critical illumination optical system configured to have a greater magnification in a first axis direction than in a second axis direction perpendicular to the first axis direction, the optical system having an elliptical arc shape mirror and a linear mirror, the elliptical arc shape mirror being arranged closer to the light source along the first axis direction than the second axis direction;
- and
- detecting an image of the imaging object formed by an imaging optical system by a detector, the detector having a detection area longer in the first axis direction than in the second axis direction and including a plurality of pixels arrayed in the first axis direction.
Dependencies are inferred from the claim text.