On-chip molecule fluorescence detection

A method for manufacturing a semiconductor device, said method comprising:

• forming a light detection layer on a substrate, wherein the light detection layer is configured to detect fluorescent light;
• forming a light filter layer on the light detection layer, wherein the light filter layer is configured to permit the fluorescent light to pass through and to block excitation light;
• forming a fluid channel layer on the light filter layer for defining a fluid channel, wherein the fluid channel has an inlet for admitting a sample stream and an outlet for discharging the sample stream, wherein the sample stream comprises at least one target cell coupled with a fluorescent source;
• forming an excitation light source for generating the excitation light, wherein the excitation light reaches the target cell coupled with the fluorescent source to generate the fluorescent light;
• and
• bonding the excitation light source onto the fluid channel layer.

A method for manufacturing a semiconductor device, said method comprising:

• forming an excitation light source on a substrate for generating excitation light, wherein the excitation light reaches a target cell coupled with a fluorescent source to generate fluorescent light;
• forming a light detection layer on the substrate, wherein the light detection layer is configured to detect the fluorescent light;
• forming an optical spacer on the substrate, wherein the optical spacer is interposed between the excitation light source and the light detection layer for preventing the excitation light from entering the light detection layer;
• forming a light filter layer on the light detection layer, wherein the light filter layer is configured to permit the fluorescent light to pass through and to block the excitation light, wherein a top surface of the light filter layer and a top surface of the optical spacer are coplanar to provide a first uniform top surface;
• forming a light guiding layer on the first uniform top surface for deflecting the excitation light from the excitation light source, wherein a top surface of the light guiding layer and a top surface of the excitation light source are coplanar to provide a second uniform top surface;
• and
• forming a fluid channel layer on the second uniform surface for defining a fluid channel, wherein the fluid channel has an inlet for admitting a sample stream and an outlet for discharging the sample stream, wherein the sample stream comprises the target cell coupled with the fluorescent source.