Floating particle detection device
AssigneeMitsubishi Electric Corporation
InventorsKenya Nakai, Nobuo Takeshita
Life of this patent
Estimating the term…
Loading patent…
AssigneeMitsubishi Electric Corporation
InventorsKenya Nakai, Nobuo Takeshita
Estimating the term…
A floating particle detection device 1 is capable of accurately identifying the type of a floating particle while achieving simplification of a configuration of the device, the device includes: a laser light irradiator (10) that includes a laser light emitting element (11) and a back-monitor-use light receiving element (12); a scattered light receiver (20) that selectively receives light of a predetermined polarization component among scattered light generated when a floating particle (50) is irradiated and that generates a second detection signal; and an identification processor (30) that identifies the type of the floating particle on the basis of a first detection signal and the second detection signal. Incident light entering the back-monitor-use light receiving element (12) includes: a back-monitor-use laser beam (L0); and backscattered light (Lbs) travelling toward the laser light irradiator (10) among the scattered light (Ls).
A floating particle detection device comprising:
Dependencies are inferred from the claim text.