Particle detection apparatus and particle detection method
AssigneeAzbil Corporation
InventorYuho Matsuura
Life of this patent
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Abstract
A particle detection apparatus includes a plurality of photodetectors that detect reaction light generated at a particle irradiated with inspection light and generate electric signals in respective channels; pulse detectors that detect pulses of the electric signals in the respective channels; a correlating unit that correlates the pulse of the electric signal in a reference channel being a channel having a highest signal-to-noise (S/N) ratio, with the pulse of the electric signal in a channel other than the reference channel generated within a predetermined time difference range with respect to the pulse of the electric signal in the reference channel; and an attribute specifying unit that specifies an attribute of the particle on the basis of the correlated pulses of the electric signals.
Claims14
A particle detection apparatus comprising:
- an inspection light source that emits inspection light;
- a plurality of photodetectors that detect reaction light generated at a particle irradiated with the inspection light and generate electric signals in respective channels;
- a pulse detector that detects pulses of the electric signals in the respective channels;
- a correlating unit that correlates the pulse of the electric signal in a reference channel being a channel having a highest signal-to-noise ratio, with the pulse of the electric signal in a channel other than the reference channel generated within a predetermined time difference range with respect to the pulse of the electric signal in the reference channel;
- and
- an attribute specifying unit that specifies an attribute of the particle on the basis of the correlated pulses of the electric signals.
A particle detection method comprising:
- detecting reaction light generated at a particle irradiated with inspection light by a plurality of photodetectors and generating electric signals in respective channels;
- detecting pulses of the electric signals in the respective channels;
- correlating the pulse of the electric signal in a reference channel being a channel having a highest signal-to-noise ratio, with the pulse of the electric signal in a channel other than the reference channel generated within a predetermined time difference range with respect to the pulse of the electric signal in the reference channel;
- and
- specifying an attribute of the particle on the basis of the correlated pulses of the electric signals.
Dependencies are inferred from the claim text.