Pressure measuring cell, including a measuring membrane arranged at a measuring cell body via a joining structure
AssigneeVEGA Grieshaber KG
InventorJörn Jacob
Life of this patent
Estimating the term…
Abstract
The invention is a pressure-measuring cell comprising a measuring cell body, a measuring membrane arranged on the front face of the measuring cell body by means of a joining structure, wherein the measuring cell body and the measuring membrane each have at least one measuring electrode, which electrodes form a measuring capacitor, and at least one support element provided on the measuring membrane and/or the measuring cell body within the joining structure.
Claims14
A pressure measuring cell with a measuring cell body, a measuring membrane arranged at a front face of the measuring cell body via a joining structure, with the measuring cell body and the measuring membrane respectively comprising at least one measuring electrode, which form a measuring capacitor, wherein at least one support element is provided at the measuring membrane and/or the measuring cell body inside the joining structure, wherein the joining structure is circumferential, and wherein the support element is arranged in a space defined by the measuring membrane, the measuring cell body, and the joining structure, wherein one height of at least one support element and one radial arrangement of at least one support element are adjusted to each other such that the support element and the measuring membrane or the support element and the measuring cell body are made to contact when a maximum measuring pressure Pmax is exceeded by at least 50% and at least one support element supports the measuring membrane at the measuring cell body.
A method for the production of a pressure measuring cell comprising at least the following steps:
- providing a measuring cell body,
- applying a metallization layer on the measuring cell body and,
- applying a first circumferential glass solder layer on the measuring cell body,
- providing a measuring membrane,
- applying a metallization layer on the measuring membrane and,
- applying a second circumferential glass solder layer on the measuring membrane, and
- arranging the measuring membrane and the measuring cell body on top of each other and melting the first glass solder layer and the second glass solder layer to form a jointing structure,
- wherein, together with the first glass solder layer and/or the second glass solder layer, another glass solder layer is applied to form a support element.
Dependencies are inferred from the claim text.