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US 9,958,349 B2Granted
Pressure sensor
AssigneeInvenSense, Inc.
InventorsJohannes Schumm, Andreas Reinhard, Thomas Kraehenbuehl, Stefan Thiele, Rene Hummel, Chung-Hsien Lin, Wang Shen Su, Tsung Lin Tang, Chia Min Lin
Life of this patent
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Abstract
A pressure sensor comprises a deformable membrane deflecting in response to pressure applied, a first stationary electrode, and a second electrode coupled to the deformable membrane, for determining a change in a capacitance between the first and the second electrode in response to the pressure applied. At least one of the first and the second electrode comprises a getter material for collecting gas molecules.
Claims16
A pressure sensor, comprising
- a deformable membrane deflecting in response to pressure applied,
- a first stationary electrode and a second electrode coupled to the deformable membrane, for determining a change in a capacitance between the first and the second electrode in response to the pressure applied,
- wherein the first stationary electrode comprises a getter material for collecting gas molecules wherein the first stationary electrode comprising the getter material comprises a first layer and a second layer, wherein the first layer comprises conducting material that is different from the getter material, and wherein the second layer is deposited on the first layer, and wherein the second layer faces a volume to collect the gas molecules from.
A pressure sensor, comprising
- a deformable membrane deflecting in response to pressure applied,
- a first stationary electrode and a second electrode coupled to the deformable membrane, for determining a change in a capacitance between the first and the second electrode in response to the pressure applied,
- wherein at least one of the first and the second electrode comprises a getter material for collecting gas molecules,
- wherein the at least one electrode that comprises the getter material comprises a first layer and a second layer, wherein the second layer comprises the getter material and wherein the second layer is deposited on the first layer, wherein the first layer comprises conducting material that is different from the getter material,
- wherein the second layer faces a volume to collect the gas molecules from,
- wherein the second layer has a plane extension and comprises slots orthogonal to the plane extension which slots reach into the first layer.
3 more elements
A pressure sensor, comprising
- a deformable membrane deflecting in response to pressure applied,
- a first stationary electrode and a second electrode coupled to the deformable membrane, for determining a change in a capacitance between the first and the second electrode in response to the pressure applied,
- wherein at least one of the first and the second electrode comprises a getter material for collecting gas molecules,
- wherein the at least one electrode that comprises the getter material comprises a center portion and a ring portion around the center portion,
- wherein the center portion comprises a first layer and a second layer, wherein the first layer comprises of conducting material that is different from the getter material, and wherein the second layer comprise the getter material, and wherein the second layer is deposited on the first layer, and
- wherein the ring portion exclusively comprises the getter material.
3 more elements
Dependencies are inferred from the claim text.