Device for preventing intensity reduction of optical signal, optical emission spectrometer, optical instrument, and mass spectrometer including the same
AssigneeIndustry-Academic Cooperation Foundation, Yonsei University
InventorJae Won Hahn
Life of this patent
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Abstract
A device for a device for preventing the intensity reduction of an optical signal, an optical emission spectrometer, an optical instrument, and a mass spectrometer including the same are provided. The device for preventing the intensity reduction includes a shielding filter which has a mesh structure capable of blocking RF electromagnetic waves radiated from a plasma field for a wafer processing, is installed in the front of an optical window of an optical emission spectrometer for measuring the plasma field from an emission spectrum image of the plasma field, and collects charging particles passing through the mesh.
Claims2
A device for preventing the intensity reduction of an optical signal, the device comprising:
- a plurality of positive electrode plates and negative electrode plates having, concentric holes formed at the center thereof and alternately arranged so as to overlap with each other to collect charging particles passing through the holes,
- wherein the positive electrode plate and the negative electrode plate are insulated from each other by a nonconductor, and
- wherein the nonconductor is configured to prevent the positive electrode plate and the negative electrode plate from being current-conducted with each other by the contamination of the nonconductor surface due to the charging particles, and comprises:
- an insulation, part inserted between the positive electrode plate and the negative electrode plate;
- an anti-contamination part formed to be spaced apart from the positive electrode plate and the negative electrode plate with a regular interval;
- and
- a connection part connecting the insulation part and the anti-contamination part.
Dependencies are inferred from the claim text.