Specimen measuring device and computer program product

A non-transitory computer-readable medium storing executable instructions that, when executed by a computer, cause the computer to:

• control a light source device to irradiate a specimen surface of a specimen with illumination light from multiple illumination units at a plurality of illumination angles;
• control the light source device to change at least one of a light quantity and an exposure time at a time of image capturing:
• control a spectral camera device arranged above the specimen surface to spectrally separate reflected light from the specimen surface and to generate two-dimensional (2D) spectral information through a single image capturing operation;
• and
• calculate deflection angle spectral information of the specimen surface used to measure a measurement value of a certain evaluation item of the specimen using a change in an optical geometrical condition of an illumination direction and an image capturing direction between pixels in an X axis direction and a Y axis direction of the spectral information, wherein
• the spectral camera device is controlled to synthesize a plurality of pieces of 2D spectral information acquired according to a change in a light quantity, an exposure time at a time of image capturing, or a light quantity and an exposure time at a time of image capturing by the light source device, and to generate the 2D spectral information having an enlarged dynamic range.