Correction device and correction method for optical measuring apparatus
AssigneeMitutoyo Corporation
InventorsRyoichi Imaizumi, Ichiro Taniguchi
Life of this patent
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Abstract
A correction device for an optical measuring apparatus obtains correction data for each scanning position of a light beam from an optical measuring apparatus that includes a light beam scanner which scans with a light beam a measuring region where a measured object is placed, and a light receiver which receives a transmitted light beam from the measuring region. The correction device includes a translucent scale having scale marks arranged at a predetermined pitch, and a support to mount the scale in the measuring region so that an arrangement direction of the scale marks is a scanning direction of the light beam.
Claims10
A correction device for an optical measuring apparatus that includes a light beam scanner which scans with a light beam a measuring region where a measured object is placed, and a light receiver which receives a transmitted light beam from the measuring region, the correction device configured to obtain correction data for each scanning position of the light beam from the optical measuring apparatus, the correction device comprising:
- a translucent scale having scale marks arranged at a predetermined pitch;
- a pin gauge configured to indicate a measurement of a pitch of the scale marks;
- a scale configured to determine a measurement value indicated by the pin gauge;
- and
- a support configured to mount the scale in the measuring region such that an arrangement direction of the scale marks is a scanning direction of the light beam,
- wherein the correction device is disposed between the light beam scanner and the light receiver of the optical measuring apparatus.
A correction method for an optical measuring apparatus that includes a light beam scanner which scans with a light beam a measuring region where a measured object is placed, and a light receiver which receives a transmitted light beam from the measuring region, the correction method comprising:
- arranging a translucent scale having scale marks arranged at a predetermined pitch in the measuring region so that an arrangement direction of the scale marks is a scanning direction of the light beam;
- emitting, using the light beam scanner at a scanning position among a plurality of scanning positions, the light beam towards the measuring region where the measured object is placed;
- receiving, using the light receiver, at least a portion of the light beam emitted by the light beam scanner;
- measuring, using a pin gauge, a pitch of the scale marks based on the received light beam;
- determining a difference between a predetermined value of the pitch of the scale marks and measured value of the pitch of the scale marks;
- and
- calculating an error of the measured value and correction data to correct the measured value based on the determined difference,
- wherein the translucent scale is disposed between the light beam scanner and the light receiver of the optical measuring apparatus.
An optical correction system, comprising:
- an optical measuring apparatus including:
- a light beam scanner which emits a light beam towards a measuring region where a measured object is placed, and
- a light receiver which receives at least a portion of the light beam emitted by the light beam scanner;
- and
- a correction device including:
- a translucent scale having scale marks arranged at a predetermined pitch and disposed between the light beam scanner and the light receiver;
- and
- a pin gauge configured to indicate a measure of a pitch of the scale marks, wherein
- the light receiver measures a value of the pitch of the scale marks based on a movement of the pin gauge, and
- the optical measuring apparatus further includes a central processing unit (CPU) configured to
- determine a difference between an actual predetermined value of the pitch of the scale marks and measured value of the pitch of the scale marks, and
- calculate an error of the measured value and correction data to correct the measured value based upon the determined difference.
Dependencies are inferred from the claim text.