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US 9,958,257 B2Granted
Increasing dynamic range of a height sensor for inspection and metrology
AssigneeKLA-Tencor Corporation
InventorShifang Li
Life of this patent
Estimating the term…
Abstract
A system includes a first beam splitter, a second beam splitter, and a mirror. The second beam splitter can produce two lines of light, which are received by at least one sensor. The two lines of light have different focal heights on the wafer. A distance between the second beam splitter and the mirror can be configured to change a focal height on the wafer. A height of an illuminated region on a surface of the wafer relative to a normal surface of the wafer can be determined using the two lines of light.
Claims16
A system comprising:
- a light source configured to provide light;
- a stage configured to hold a wafer to receive the light from the light source;
- a first beam splitter disposed in a path of the light from the light source;
- a complementary plate disposed in a path of the light reflected from the wafer through the first beam splitter;
- a second beam splitter disposed in a path of the light from the first beam splitter and the complementary plate, wherein the second beam splitter is configured to produce two lines of light, and wherein the two lines of light have different focal heights on the wafer;
- at least one sensor, wherein the sensor receives the two lines of light;
- a mirror disposed in a path of light between the second beam splitter and the sensor, wherein a distance between the second beam splitter and the mirror is configured to change a focal height on the wafer;
- and
- a processor in electrical communication with the sensor, wherein the processor is configured to determine a height of an illuminated region on a surface of the wafer relative to a normal surface of the wafer, wherein the processor is configured to determine the height using respective heights of the two lines of light and a focal point offset of the two lines of light, wherein the processor is configured to determine whether the illuminated region on the surface is below the normal surface based on a dimension of the two lines of light, and wherein the processor is configured to determine whether the illuminated region on the surface is above the normal surface based on the dimension of the two lines of light.
6 more elements
A method comprising:
- reflecting light off a first beam splitter;
- reflecting the light off a surface of a wafer;
- passing the light through the first beam splitter and a complementary plate;
- passing the light from the complementary plate through a second beam splitter;
- producing two lines of light with the second beam splitter;
- reflecting one of the two lines of light from the second beam splitter with a mirror;
- receiving each of the two lines of light with at least one sensor, wherein the two lines of light have different focal heights on the wafer;
- determining, using a processor in electronic communication with the sensor, a height of an illuminated region on a surface of the wafer relative to a normal surface of the wafer using the two lines of light, wherein the determining the height includes using respective heights of the two lines of light and a focal point offset of the two lines of light;
- determining, using the processor, whether the illuminated region on the surface is below the normal surface based on a dimension of the two lines of light;
- and
- determining, using the processor, whether the illuminated region on the surface is above the normal surface based on the dimension of the two lines of light.
8 more elements
Dependencies are inferred from the claim text.